Tool Info Automation Solutions

Benefits

Tool automation is one of the most important step in the early stages of yield improvement. FS-TECH also provides solutions in this stage. Deliver tool data via SECS/GEM (or create tool process data parser to translate process log), integrate MES or other system for process control and improve, and then execute real-time product control.
Get more information from manufacturing process in real time and prevent defects that influece production quality. It's not only an important element of system monitoring, analysis, improvement, but also the important foundation works towards industry 4.0.